World-class multi-purpose cleanroom facilities for thin-film device fabrication in the field of microsystems nanotechnology, offering a complete and flexible range of process equipment and a well-trained crew of process and equipment engineers.
Facilities
At the core of the MiPlaza facilities, located on the Eindhoven High Tech Campus, a state-of-the art, multi-purpose cleanroom (class 100-10000) of 2650 m2 offers a broad range of process equipment for making thin-film devices. The infrastructure includes machines for deposition, lithography, etching and measuring, and is capable of handling substrates of any shape, in sizes up to 200 mm. A high flexibility in combining materials and processing methods gives excellent opportunities for rapid prototyping. Furthermore, a major part of the processes is continuously controlled, allowing pre-pilot fabrication for customer sampling.
Services
We offer access to our facilities on several service levels. Our customers can hire cleanroom space for placing and operating their own equipment, use the materials and devices processing equipment infrastructure as a guest, hire experienced process engineers for service jobs or long-term projects, or order thin-film products on the basis of an agreed specification.